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Appendix I - Continued - 14186_147
Appendix II Reference List - 14186_149

Neets Module 14-Introduction to Microelectronics
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AI-4 THIN FILM COMPONENTS—Passive circuit elements (resistors and capacitors) deposited on a substrate to a thickness of 0.0001 centimeter. VACUUM EVAPORATION—Process of producing thin film components. VERY LARGE SCALE INTEGRATION (vlsi)—An integrated circuit containing over 2,000 logic gates or 64,000 bits of memory. WAFER—A slice of semiconductor material upon which monolithic ICs are produced.






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